AlN Ceramics for 10.6 µm Band Hollow Waveguide

The complex refractive index of the aluminum nitride ceramics was measured at 10.6 µm wavelength. Then the attenuation constant of a rectangular hollow waveguide with the cross section 2 mm × 2 mm was calculated as 0.02 dB/m. Taking advantage of this low-loss property together with the high thermal conductivity, a trial waveguide CO 2 laser was constructed. Maximum output power of 3.1 W (0.44 W/cm) was obtained.