Simultaneous charged particle activation analysis of carbon and boron in gallium arsenide

A simple method has been developed for simultaneous determination of carbon and boron in GaAs by deuteron activation analysis. The detection limit is 2×10 14 atoms·cm -3 for both elements. The determined carbon concentrations are compared with the results of IR spectrophotometry.

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Veröffentlicht in:Japanese Journal of Applied Physics 1985-01, Vol.24 (10), p.L801-L802
Hauptverfasser: NOZAKI, T, ITOH, Y, OHKUBO, Y, KIMURA, T, FUKUSHIMA, H
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container_end_page L802
container_issue 10
container_start_page L801
container_title Japanese Journal of Applied Physics
container_volume 24
creator NOZAKI, T
ITOH, Y
OHKUBO, Y
KIMURA, T
FUKUSHIMA, H
description A simple method has been developed for simultaneous determination of carbon and boron in GaAs by deuteron activation analysis. The detection limit is 2×10 14 atoms·cm -3 for both elements. The determined carbon concentrations are compared with the results of IR spectrophotometry.
doi_str_mv 10.1143/jjap.24.l801
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ispartof Japanese Journal of Applied Physics, 1985-01, Vol.24 (10), p.L801-L802
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1347-4065
language eng
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects Condensed matter: structure, mechanical and thermal properties
Defects and impurities in crystals
microstructure
Exact sciences and technology
Impurities: concentration, distribution, and gradients
Physics
Structure of solids and liquids
crystallography
title Simultaneous charged particle activation analysis of carbon and boron in gallium arsenide
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