Simultaneous charged particle activation analysis of carbon and boron in gallium arsenide

A simple method has been developed for simultaneous determination of carbon and boron in GaAs by deuteron activation analysis. The detection limit is 2×10 14 atoms·cm -3 for both elements. The determined carbon concentrations are compared with the results of IR spectrophotometry.

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Bibliographische Detailangaben
Veröffentlicht in:	Japanese Journal of Applied Physics 1985-01, Vol.24 (10), p.L801-L802
Hauptverfasser:	NOZAKI, T, ITOH, Y, OHKUBO, Y, KIMURA, T, FUKUSHIMA, H
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Defects and impurities in crystals microstructure Exact sciences and technology Impurities: concentration, distribution, and gradients Physics Structure of solids and liquids crystallography
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Beschreibung
Zusammenfassung:	A simple method has been developed for simultaneous determination of carbon and boron in GaAs by deuteron activation analysis. The detection limit is 2×10 14 atoms·cm -3 for both elements. The determined carbon concentrations are compared with the results of IR spectrophotometry.
ISSN:	0021-4922 1347-4065
DOI:	10.1143/jjap.24.l801