Stationary Large Area Exposure in Synchrotron Radiation Lithography Utilizing a New Arrangement of Magnets Applied to the Storage Ring

A new arrangement of magnets called the sliding-wiggler in a storage ring dedicated to lithographic purposes is proposed. The exposure can be enlarged up to an area of 100 mm × 100 mm stationarily. Most of the emitted radiation is utilized and the throughput will be more than thirty times as much as with commercial bending magnets.