AlGaN/GaN-on-Silicon Metal–Oxide–Semiconductor High-Electron-Mobility Transistor with Breakdown Voltage of 800 V and On-State Resistance of 3 m$\Omega$$\cdot$cm$^{2}$ Using a Complementary Metal–Oxide–Semiconductor Compatible Gold-Free Process
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Veröffentlicht in: | Applied physics express 2012-06, Vol.5 (6), p.66501 |
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container_title | Applied physics express |
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creator | Liu, Xinke Zhan, Chunlei Chan, Kwok Wai Liu, Wei Tan, Leng Seow Chen, Kevin Jing Yeo, Yee-Chia |
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doi_str_mv | 10.1143/APEX.5.066501 |
format | Article |
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source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
title | AlGaN/GaN-on-Silicon Metal–Oxide–Semiconductor High-Electron-Mobility Transistor with Breakdown Voltage of 800 V and On-State Resistance of 3 m$\Omega$$\cdot$cm$^{2}$ Using a Complementary Metal–Oxide–Semiconductor Compatible Gold-Free Process |
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