Properties of Ti coatings deposited by high-power ion beams

Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma produced by irradiating a Ti target with high-power ion beams. The dependences of the adhesion, nanohardness, Young’s modulus, and friction coefficient on the distance between the sputtered target and the subs...

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Veröffentlicht in:	Inorganic materials : applied research 2012-05, Vol.3 (3), p.220-225
Hauptverfasser:	Struts, V. K., Matvienko, V. M., Petrov, A. V., Ryabchikov, A. I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry Chemistry and Materials Science Functional Coatings and Surface Treatment Industrial Chemistry/Chemical Engineering Inorganic Chemistry Materials Science
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma produced by irradiating a Ti target with high-power ion beams. The dependences of the adhesion, nanohardness, Young’s modulus, and friction coefficient on the distance between the sputtered target and the substrate and on the thickness of the coating are studied for thin-film titanium coatings. The formation of a transition layer with an alternating content of Ti is found to increase coating adhesion.
ISSN:	2075-1133 2075-115X
DOI:	10.1134/S2075113311030269