Analysis of mechanisms of dielectric target charging under the effect of electron irradiation

The kinetics of charging of dielectric targets during their irradiation with electrons with energy of 2–30 keV are investigated both theoretically and experimentally. The dependences of equilibrium surface potentials and corresponding energies of primary electrons on the irradiation time at different current densities are obtained. The equilibrium parameters and characteristic times of charging are shown to differ substantially from the values calculated using a standard charging model of electron emission from an uncharged dielectric. The obtained experimental data are theoretically substantiated.