X-ray fluorescence analysis of chalcogenide glass with electron beam fluorescence excitation

The method of X-ray fluorescence analysis with the fluorescence excitation by an electron beam with 30 keV energy was used to determine the germanium, arsenic, and selenium content in the Ge 1– x Se x , As 1– x Se x , and Ge 1– x – y AsySe x glassy alloys. This technique allows determining the quantitative glass composition with an accuracy of ±0.0002 in the surface layer of a depth of ~0.1 µm from parameters x and y of the linear calibration dependences.