Using focused ion beam for nanosized structure formation in microfluidic chips

Microfluidic chips (MFCs) provide a basis for modern compact analytical systems possessing unique performance characteristics. Using nanosized functional structures in MFCs opens new possibilities in this field. Results of the formation of nanosized structures used as traps for microscopic particles in MFC channels are presented and discussed. Micron-sized channels in MFC structures on glass substrates were formed by photolithography and acid etching, while nanosized structures were obtained using focused ion and electron beams. The proposed MFC structures can be used for studying biological objects by high-resolution microscopy techniques.