Highly efficient high-power continuous extreme ultraviolet source for irradiating samples with a large total area

An original arc-discharge source of cw extreme ultraviolet (10–75 nm) radiation is described, which provides an output power level of ∼10 kW at an efficiency of ∼10% (at least, in the 30–70 nm range). The source is simple to manufacture, possesses a working life of ∼1000 h, and is capable of irradiating samples with a total exposed area of 0.1–1 m 2 .