Resistive switching in Au/TiO2/Pt thin film structures on silicon

The conditions and mechanisms of preliminary treatment in strong electric fields (forming) and subsequent resistive switching in Au/TiO 2 /Pt thin-film structures on silicon were investigated. The thin TiO 2 films in these structures were prepared by different methods, namely, vacuum evaporation of metallic titanium followed by thermal oxidation in air and radio-frequency cathode sputtering of titanium dioxide from a powder target. The current-voltage and voltage-capacitance characteristics of the structures, as well as the dependences of their conductivity on the time of exposure to a dc voltage of different polarities and on the temperature were measured. The data obtained permitted the conclusion that the physical mechanism underlying the forming process consists in a sharp increase in the density of surface states in TiO 2 films due to the electric breakdown of the Schottky barrier at the contact with the platinum electrode, whereas the resistive switching of the structures is governed by the variation in the population of surface states in the TiO 2 band gap and/or in the defect concentration in the barrier region of the structures acted upon by voltage pulses of different polarities.