Effect of bottom-electrode morphology on the dielectric characteristics of the metal-ferroelectric-metal planar structure

The effect of the morphology of metal-ferroelectric-metal interfaces on their electrical properties is studied. The effect of buffer layers and methods for depositing electrodes on ferroelectric-film morphology are experimentally studied. A theoretical analysis of the dielectric properties is perfor...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2014-12, Vol.48 (13), p.1704-1709
Hauptverfasser: Roshchin, V. M., Silibin, M. V., Yakovlev, V. B., Yakovleva, E. N.
Format: Artikel
Sprache:eng
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Zusammenfassung:The effect of the morphology of metal-ferroelectric-metal interfaces on their electrical properties is studied. The effect of buffer layers and methods for depositing electrodes on ferroelectric-film morphology are experimentally studied. A theoretical analysis of the dielectric properties is performed based on the experimental data for heterostructures; however, final estimation is carried out using mathematical modeling methods.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782614130120