Effect of bottom-electrode morphology on the dielectric characteristics of the metal-ferroelectric-metal planar structure
The effect of the morphology of metal-ferroelectric-metal interfaces on their electrical properties is studied. The effect of buffer layers and methods for depositing electrodes on ferroelectric-film morphology are experimentally studied. A theoretical analysis of the dielectric properties is perfor...
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Veröffentlicht in: | Semiconductors (Woodbury, N.Y.) N.Y.), 2014-12, Vol.48 (13), p.1704-1709 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The effect of the morphology of metal-ferroelectric-metal interfaces on their electrical properties is studied. The effect of buffer layers and methods for depositing electrodes on ferroelectric-film morphology are experimentally studied. A theoretical analysis of the dielectric properties is performed based on the experimental data for heterostructures; however, final estimation is carried out using mathematical modeling methods. |
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ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782614130120 |