Effect of the preliminary transformation of experimental data on the accuracy of results of processing X-ray reflectograms

An effect of the preliminary transformation of experimental data of relative two-wave X-ray reflectometry on the accuracy of determining parameters of multilayer structures is described. The efficiency of applying the CUDA technology to the computer processing of results is investigated. An efficien...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Russian microelectronics 2012-12, Vol.41 (7), p.437-442
Hauptverfasser: Kartashov, D. A., Medetov, N. A., Smirnov, D. I., Orlov, R. S.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:An effect of the preliminary transformation of experimental data of relative two-wave X-ray reflectometry on the accuracy of determining parameters of multilayer structures is described. The efficiency of applying the CUDA technology to the computer processing of results is investigated. An efficient implementation of calculations in modeling the relative two-wave X-ray reflectometry using CUDA is proposed.
ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739712070074