Operation of an electronic lithograph in the mode of a scanning electron microscope

Operation of an electronic lithograph in the mode of a scanning electron microscope

The operation of the Raith-150 electronic lithograph in the mode of a scanning electron microscope is examined. Sizes of the pixel and effective diameter of an electron probe are determined along both scanning directions. The parameters of a system for scanning and forming the lithograph’s electron...

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Veröffentlicht in:Russian microelectronics 2012-11, Vol.41 (6), p.347-350
Hauptverfasser: Kal’nov, V. A., Novikov, Yu. A., Orlikovsky, A. A.
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container_start_page 347
container_title Russian microelectronics
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creator Kal’nov, V. A.
Novikov, Yu. A.
Orlikovsky, A. A.
description The operation of the Raith-150 electronic lithograph in the mode of a scanning electron microscope is examined. Sizes of the pixel and effective diameter of an electron probe are determined along both scanning directions. The parameters of a system for scanning and forming the lithograph’s electron probe compare well with those of the best scanning electron microscopes.
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fullrecord <record><control><sourceid>crossref_sprin</sourceid><recordid>TN_cdi_crossref_primary_10_1134_S1063739712020072</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1134_S1063739712020072</sourcerecordid><originalsourceid>FETCH-LOGICAL-c2032-93bb7c6e2277495e32b44f4099e903ce0488505e39f8e93c6cc41430449982b33</originalsourceid><addsrcrecordid>eNp9kMtOwzAQRS0EEqXwAez8A4HxIw8vUcWjUqUuCuvIMZPEVWJHdljw9zgUsUFiNaO5586MLiG3DO4YE_L-wKAQpVAl48ABSn5GVqyAKhOS5eepT3K26JfkKsYjAAMoihU57CcMerbeUd9S7SgOaObgnTV0sHPvu6CnnlpH5x7p6N_xm6PRaOes6355OloTfDR-wmty0eoh4s1PXZO3p8fXzUu22z9vNw-7zHAQPFOiaUpTIOdlKVWOgjdSthKUQgXCIMiqyiHNVVuhEqYwRjIpQEqlKt4IsSbstHc5HAO29RTsqMNnzaBeUqn_pJI8_OSJiXUdhvroP4JLb_5j-gIPvWLS</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Operation of an electronic lithograph in the mode of a scanning electron microscope</title><source>Springer Nature - Complete Springer Journals</source><creator>Kal’nov, V. A. ; Novikov, Yu. A. ; Orlikovsky, A. A.</creator><creatorcontrib>Kal’nov, V. A. ; Novikov, Yu. A. ; Orlikovsky, A. A.</creatorcontrib><description>The operation of the Raith-150 electronic lithograph in the mode of a scanning electron microscope is examined. Sizes of the pixel and effective diameter of an electron probe are determined along both scanning directions. The parameters of a system for scanning and forming the lithograph’s electron probe compare well with those of the best scanning electron microscopes.</description><identifier>ISSN: 1063-7397</identifier><identifier>EISSN: 1608-3415</identifier><identifier>DOI: 10.1134/S1063739712020072</identifier><language>eng</language><publisher>Dordrecht: SP MAIK Nauka/Interperiodica</publisher><subject>Electrical Engineering ; Engineering</subject><ispartof>Russian microelectronics, 2012-11, Vol.41 (6), p.347-350</ispartof><rights>Pleiades Publishing, Ltd. 2012</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c2032-93bb7c6e2277495e32b44f4099e903ce0488505e39f8e93c6cc41430449982b33</citedby><cites>FETCH-LOGICAL-c2032-93bb7c6e2277495e32b44f4099e903ce0488505e39f8e93c6cc41430449982b33</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1063739712020072$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1063739712020072$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,777,781,27905,27906,41469,42538,51300</link.rule.ids></links><search><creatorcontrib>Kal’nov, V. A.</creatorcontrib><creatorcontrib>Novikov, Yu. A.</creatorcontrib><creatorcontrib>Orlikovsky, A. A.</creatorcontrib><title>Operation of an electronic lithograph in the mode of a scanning electron microscope</title><title>Russian microelectronics</title><addtitle>Russ Microelectron</addtitle><description>The operation of the Raith-150 electronic lithograph in the mode of a scanning electron microscope is examined. Sizes of the pixel and effective diameter of an electron probe are determined along both scanning directions. The parameters of a system for scanning and forming the lithograph’s electron probe compare well with those of the best scanning electron microscopes.</description><subject>Electrical Engineering</subject><subject>Engineering</subject><issn>1063-7397</issn><issn>1608-3415</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNp9kMtOwzAQRS0EEqXwAez8A4HxIw8vUcWjUqUuCuvIMZPEVWJHdljw9zgUsUFiNaO5586MLiG3DO4YE_L-wKAQpVAl48ABSn5GVqyAKhOS5eepT3K26JfkKsYjAAMoihU57CcMerbeUd9S7SgOaObgnTV0sHPvu6CnnlpH5x7p6N_xm6PRaOes6355OloTfDR-wmty0eoh4s1PXZO3p8fXzUu22z9vNw-7zHAQPFOiaUpTIOdlKVWOgjdSthKUQgXCIMiqyiHNVVuhEqYwRjIpQEqlKt4IsSbstHc5HAO29RTsqMNnzaBeUqn_pJI8_OSJiXUdhvroP4JLb_5j-gIPvWLS</recordid><startdate>201211</startdate><enddate>201211</enddate><creator>Kal’nov, V. A.</creator><creator>Novikov, Yu. A.</creator><creator>Orlikovsky, A. A.</creator><general>SP MAIK Nauka/Interperiodica</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>201211</creationdate><title>Operation of an electronic lithograph in the mode of a scanning electron microscope</title><author>Kal’nov, V. A. ; Novikov, Yu. A. ; Orlikovsky, A. A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c2032-93bb7c6e2277495e32b44f4099e903ce0488505e39f8e93c6cc41430449982b33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Electrical Engineering</topic><topic>Engineering</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kal’nov, V. A.</creatorcontrib><creatorcontrib>Novikov, Yu. A.</creatorcontrib><creatorcontrib>Orlikovsky, A. A.</creatorcontrib><collection>CrossRef</collection><jtitle>Russian microelectronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kal’nov, V. A.</au><au>Novikov, Yu. A.</au><au>Orlikovsky, A. A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Operation of an electronic lithograph in the mode of a scanning electron microscope</atitle><jtitle>Russian microelectronics</jtitle><stitle>Russ Microelectron</stitle><date>2012-11</date><risdate>2012</risdate><volume>41</volume><issue>6</issue><spage>347</spage><epage>350</epage><pages>347-350</pages><issn>1063-7397</issn><eissn>1608-3415</eissn><abstract>The operation of the Raith-150 electronic lithograph in the mode of a scanning electron microscope is examined. Sizes of the pixel and effective diameter of an electron probe are determined along both scanning directions. The parameters of a system for scanning and forming the lithograph’s electron probe compare well with those of the best scanning electron microscopes.</abstract><cop>Dordrecht</cop><pub>SP MAIK Nauka/Interperiodica</pub><doi>10.1134/S1063739712020072</doi><tpages>4</tpages></addata></record>
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Engineering
title Operation of an electronic lithograph in the mode of a scanning electron microscope
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-21T00%3A55%3A33IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref_sprin&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Operation%20of%20an%20electronic%20lithograph%20in%20the%20mode%20of%20a%20scanning%20electron%20microscope&rft.jtitle=Russian%20microelectronics&rft.au=Kal%E2%80%99nov,%20V.%20A.&rft.date=2012-11&rft.volume=41&rft.issue=6&rft.spage=347&rft.epage=350&rft.pages=347-350&rft.issn=1063-7397&rft.eissn=1608-3415&rft_id=info:doi/10.1134/S1063739712020072&rft_dat=%3Ccrossref_sprin%3E10_1134_S1063739712020072%3C/crossref_sprin%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true