Operation of an electronic lithograph in the mode of a scanning electron microscope

Operation of an electronic lithograph in the mode of a scanning electron microscope

The operation of the Raith-150 electronic lithograph in the mode of a scanning electron microscope is examined. Sizes of the pixel and effective diameter of an electron probe are determined along both scanning directions. The parameters of a system for scanning and forming the lithograph’s electron...

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Veröffentlicht in:Russian microelectronics 2012-11, Vol.41 (6), p.347-350
Hauptverfasser: Kal’nov, V. A., Novikov, Yu. A., Orlikovsky, A. A.
Format: Artikel
Sprache:eng
Schlagworte:
Electrical Engineering
Engineering
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Zusammenfassung:The operation of the Raith-150 electronic lithograph in the mode of a scanning electron microscope is examined. Sizes of the pixel and effective diameter of an electron probe are determined along both scanning directions. The parameters of a system for scanning and forming the lithograph’s electron probe compare well with those of the best scanning electron microscopes.
ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739712020072