Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles

The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteri...

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Veröffentlicht in:Russian microelectronics 2010-11, Vol.39 (6), p.405-410
Hauptverfasser: Degtyarev, A. V., Kudrya, V. P., Maishev, Yu. P.
Format: Artikel
Sprache:eng
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Zusammenfassung:The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows.
ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739710060053