Thin-film protective coatings of beryllium windows and lenses for intense X-ray radiation sources

The results of experiments on the formation and investigation of thin film Al 2 O 3 coatings grown via atomic-layer deposition onto beryllium components for X-ray optics applications are detailed. The chemical properties and the structural and phase compositions of coated samples prior to and after exposure to a monochromatic and nonmonochromatic (“white”) synchrotron radiation with a power of up to 1 kW are studied. Approbation demonstrated the high durability of coatings exposed to an intense beam and the prevention of the penetration of unbound beryllium particles to the surface.