Comparison of the hardness of TiC/a-C coatings obtained by the method of the magnetron sputtering of a graphite target with high- and low-power pulses

Comparison of the hardness of TiC/a-C coatings obtained by the method of the magnetron sputtering of a graphite target with high- and low-power pulses

TiC/a-C coatings 0.1–2.0 μm thick are deposited onto substrates made of (WC + Ti) hard alloy or stainless steel by the method of the pulsed magnetron sputtering of Ti and graphite targets. The microhardness of coatings obtained by the sputtering of a graphite target by pulses of high (∼1 kW/cm 2 ) a...

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Veröffentlicht in:Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2014-11, Vol.8 (6), p.1119-1123
Hauptverfasser: Mamaev, A. S., Kaygorodov, A. S.
Format: Artikel
Sprache:eng
Schlagworte:
Chemistry and Materials Science
Materials Science
Surfaces and Interfaces
Thin Films
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Zusammenfassung:TiC/a-C coatings 0.1–2.0 μm thick are deposited onto substrates made of (WC + Ti) hard alloy or stainless steel by the method of the pulsed magnetron sputtering of Ti and graphite targets. The microhardness of coatings obtained by the sputtering of a graphite target by pulses of high (∼1 kW/cm 2 ) and low power (∼25 W/cm 2 ) is compared. The effect of the coating thickness on the measured value of the microhardness is investigated. It is shown that maximum values of coating hardness (35 ± 5 GPa) are attained at a Ti/C ratio of 0.6–0.9.
ISSN:1027-4510
1819-7094
DOI:10.1134/S102745101406010X