Studies of thermal stability of nanocrystalline SnO2, ZrO2, and SiC for semiconductor and thermocatalytic gas sensors

The thermal stability of synthesized and commercial SnO 2 , ZrO 2 , and SiC nanopowders is compared. The crystallite growth rate during the isothermal annealing of the materials at 700°C for 30 h is evaluated. The crystallites’ average size was determined by X-ray phase analysis (using the Scherrer method). The effect of impurity content on the kinetics of crystallite growth is studied for the synthesized SnO 2 and ZrO 2 . Semiconductor and thermocatalytic sensors, based on the synthesized and commercial materials, are manufactured. The long-term stability of the sensors’ signal is compared with the thermal stability of the nanopowders.