Features of interpreting ellipsometric measurement results
Modifications of commonly used Malin-Vedam and minimization methods for solving the inverse problem of ellipsometry are proposed. The fields and features of their application are described. Examples of using these methods for interpreting results of ellipsometric measurements of a diamond-like a-C:N...
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| Veröffentlicht in: | Optics and spectroscopy 2012-02, Vol.112 (2), p.300-304 |
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| container_title | Optics and spectroscopy |
| container_volume | 112 |
| creator | Tikhii, A. A. Gritskikh, V. A. Kara-Murza, S. V. Nikolaenko, Yu. M. Zhikharev, I. V. |
| description | Modifications of commonly used Malin-Vedam and minimization methods for solving the inverse problem of ellipsometry are proposed. The fields and features of their application are described. Examples of using these methods for interpreting results of ellipsometric measurements of a diamond-like a-C:N film and La
0.7
Sr
0.3
MnO
3
films are presented. |
| doi_str_mv | 10.1134/S0030400X12020257 |
| format | Article |
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0.7
Sr
0.3
MnO
3
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0.7
Sr
0.3
MnO
3
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| identifier | ISSN: 0030-400X |
| ispartof | Optics and spectroscopy, 2012-02, Vol.112 (2), p.300-304 |
| issn | 0030-400X 1562-6911 |
| language | eng |
| recordid | cdi_crossref_primary_10_1134_S0030400X12020257 |
| source | SpringerNature Journals |
| subjects | Lasers Optical Devices Optics Photonics Physical Optics Physics Physics and Astronomy |
| title | Features of interpreting ellipsometric measurement results |
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