Features of interpreting ellipsometric measurement results

Features of interpreting ellipsometric measurement results

Modifications of commonly used Malin-Vedam and minimization methods for solving the inverse problem of ellipsometry are proposed. The fields and features of their application are described. Examples of using these methods for interpreting results of ellipsometric measurements of a diamond-like a-C:N...

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Veröffentlicht in:Optics and spectroscopy 2012-02, Vol.112 (2), p.300-304
Hauptverfasser: Tikhii, A. A., Gritskikh, V. A., Kara-Murza, S. V., Nikolaenko, Yu. M., Zhikharev, I. V.
Format: Artikel
Sprache:eng
Schlagworte:
Lasers
Optical Devices
Optics
Photonics
Physical Optics
Physics
Physics and Astronomy
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Zusammenfassung:Modifications of commonly used Malin-Vedam and minimization methods for solving the inverse problem of ellipsometry are proposed. The fields and features of their application are described. Examples of using these methods for interpreting results of ellipsometric measurements of a diamond-like a-C:N film and La 0.7 Sr 0.3 MnO 3 films are presented.
ISSN:0030-400X
1562-6911
DOI:10.1134/S0030400X12020257