“Structure” facility with a linear ion source for the formation of ordered nanostructures

“Structure” facility with a linear ion source for the formation of ordered nanostructures

The design of the developed ion-beam facility with the Tamiris 400-f source (Roth&Rau AG, Germany) is described. The facility is intended for the formation of ordered nanostructures (up to 200 × 200 mm). Themain results of optimizing its parameters for increasing the uniformity and the ion-beam...

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Veröffentlicht in:Instruments and experimental techniques (New York) 2015-07, Vol.58 (4), p.574-580
Hauptverfasser: Ivanov, A. G., Ivanov, V. V., Karpov, D. A., Klimchenko, M. A., Komarov, A. O., Litunovsky, V. N., Filippov, A. A.
Format: Artikel
Sprache:eng
Schlagworte:
Electrical Engineering
Laboratory Techniques
Measurement Science and Instrumentation
Physical Chemistry
Physics
Physics and Astronomy
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Beschreibung
Zusammenfassung:The design of the developed ion-beam facility with the Tamiris 400-f source (Roth&Rau AG, Germany) is described. The facility is intended for the formation of ordered nanostructures (up to 200 × 200 mm). Themain results of optimizing its parameters for increasing the uniformity and the ion-beam current density (the ion-beam nonuniformity is at most ±5%, and the current density is j ⩾ 1 mA/cm 2 ) are presented.
ISSN:0020-4412
1608-3180
DOI:10.1134/S0020441215040041