A plasmochemical reactor based on a beam-plasma discharge

A plasmochemical reactor based on a beam-plasma discharge

A pilot technological facility implementing a new type of plasmochemical reactor on the basis of a beam-plasma discharge was developed. Specific features of the reactor design are described. The design of the electron injector as the most important unit of the reactor is described. The developed fac...

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Veröffentlicht in:Instruments and experimental techniques (New York) 2014, Vol.57 (1), p.82-85
Hauptverfasser: Isaev, N. V., Klykov, I. L., Peskov, V. V., Shustin, E. G., Vizgalov, I. V., Kurnaev, V. A.
Format: Artikel
Sprache:eng
Schlagworte:
Electrical Engineering
Laboratory Techniques
Measurement Science and Instrumentation
Physical Chemistry
Physics
Physics and Astronomy
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Beschreibung
Zusammenfassung:A pilot technological facility implementing a new type of plasmochemical reactor on the basis of a beam-plasma discharge was developed. Specific features of the reactor design are described. The design of the electron injector as the most important unit of the reactor is described. The developed facility was tested and its main characteristics were measured. The technological features of treatment (etching, deposition) of nonconducting structures are presented.
ISSN:0020-4412
1608-3180
DOI:10.1134/S002044121401014X