A starting device for a metal plasma source

A starting device for a metal plasma source

An explosion of a thin self-renewable carbon film is used for initiating an arc in a vacuum-arc metal plasma source, which makes operation of the device independent of the operating mode of the plasma source and allows the circuit of the setup to be simplified, since there is no need for generating...

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Veröffentlicht in:Instruments and experimental techniques (New York) 2008, Vol.51 (1), p.135-136
Hauptverfasser: Grigor’ev, A. N., Turchina, A. K.
Format: Artikel
Sprache:eng
Schlagworte:
Electrical Engineering
Laboratory Techniques
Measurement Science and Instrumentation
Physical Chemistry
Physics
Physics and Astronomy
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Beschreibung
Zusammenfassung:An explosion of a thin self-renewable carbon film is used for initiating an arc in a vacuum-arc metal plasma source, which makes operation of the device independent of the operating mode of the plasma source and allows the circuit of the setup to be simplified, since there is no need for generating high-voltage triggering pulses. The service life of this device in vacuum is more than 10 5 triggering pulses.
ISSN:0020-4412
1608-3180
DOI:10.1134/S002044120801017X