Heating of a gas and a polymeric material in low-temperature plasma of a high-frequency discharge

A model of the thermal process in high-frequency capacitive discharge plasma of low pressure in air is considered. The influence of the discharge power and pressure on the temperature distribution in the discharge gap (including the case where a polymer film sample is placed in it) is analyzed. The results of numerical calculations are compared with the data of direct measurements of the gas temperature in the discharge and the film temperature. An example of the practical use of the technique for calculating the temperature field in a discharge during plasma modification of a polymer surface is shown.