Kinetics and concentration of active particles in nonequilibrium low temperature methane plasma
We have investigated the stationary parameters and the composition of the DC glow discharge plasma ( p = 40–200 Pa, i = 30–70 mA) in methane by means of the probe technique and numerical simulation. We have obtained data on the reduced strength of the electric field, on the rate constants of the pro...
Gespeichert in:
Veröffentlicht in: | High temperature 2014-05, Vol.52 (3), p.348-354 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | We have investigated the stationary parameters and the composition of the DC glow discharge plasma (
p
= 40–200 Pa,
i
= 30–70 mA) in methane by means of the probe technique and numerical simulation. We have obtained data on the reduced strength of the electric field, on the rate constants of the processes under electron impact, and on the stationary concentrations of the neutral and charged particles. |
---|---|
ISSN: | 0018-151X 1608-3156 |
DOI: | 10.1134/S0018151X14020205 |