The formation of volume elements for microelectromechanical systems in polyimide by method of reactive ion beam etching
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| Veröffentlicht in: | Technical physics letters 2001-02, Vol.27 (2), p.90-92 |
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| Sprache: | eng |
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| container_end_page | 92 |
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| container_issue | 2 |
| container_start_page | 90 |
| container_title | Technical physics letters |
| container_volume | 27 |
| creator | Stognij, A. I. Orekhovskaya, T. I. Timoshkov, Yu. V. Koryakin, S. V. |
| description | |
| doi_str_mv | 10.1134/1.1352757 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 1063-7850 |
| ispartof | Technical physics letters, 2001-02, Vol.27 (2), p.90-92 |
| issn | 1063-7850 1090-6533 |
| language | eng |
| recordid | cdi_crossref_primary_10_1134_1_1352757 |
| source | Springer Nature - Complete Springer Journals |
| title | The formation of volume elements for microelectromechanical systems in polyimide by method of reactive ion beam etching |
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