Reduction of elastic strains in directly-bonded silicon structures
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| Veröffentlicht in: | Physics of the solid state 1999-11, Vol.41 (11), p.1790-1798 |
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| container_end_page | 1798 |
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| container_issue | 11 |
| container_start_page | 1790 |
| container_title | Physics of the solid state |
| container_volume | 41 |
| creator | Argunova, T. S. Vitman, R. F. Grekhov, I. V. Kostina, L. S. Kudryavtseva, T. V. Gutkin, M. Yu Shturbin, A. V. Härtwig, J. Ohler, M. Kim, E. D. Kim, S. Ch |
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| doi_str_mv | 10.1134/1.1131099 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 1063-7834 |
| ispartof | Physics of the solid state, 1999-11, Vol.41 (11), p.1790-1798 |
| issn | 1063-7834 1090-6460 |
| language | eng |
| recordid | cdi_crossref_primary_10_1134_1_1131099 |
| source | SpringerNature Journals |
| title | Reduction of elastic strains in directly-bonded silicon structures |
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