Polymer-matrix nanocomposites bombarded by large Ar clusters and low energy Cs ions: Sputtering and topography development

In secondary ion mass spectrometry, hybrid materials such as organic matrices loaded with inorganic nanoparticles (NPs) are notoriously difficult to depth profile with any known ion beam, including large Ar clusters, although they display excellent performance with pure organic materials and polymer...

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Veröffentlicht in:Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2018-05, Vol.36 (3)
Hauptverfasser: Edwards, Ryan, Mesfin, Henok Mebratie, Pospisilova, Eva, Poleunis, Claude, Bailly, Christian, Delcorte, Arnaud
Format: Artikel
Sprache:eng
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Zusammenfassung:In secondary ion mass spectrometry, hybrid materials such as organic matrices loaded with inorganic nanoparticles (NPs) are notoriously difficult to depth profile with any known ion beam, including large Ar clusters, although they display excellent performance with pure organic materials and polymers. To improve their understanding of the detrimental effects of the hybrid material nature on depth profiling, a precise evaluation of the sputtering and roughness induced upon Cs ion and Ar cluster beam bombardment of a series of composite samples was performed. For this purpose, the authors focused on the sputtering of a selection of extruded, hot-pressed polymer-matrix nanocomposite films by large Ar clusters (20 keV Ar1000+–20 eV/at and 10 keV Ar3000+–3.3 eV/at) and low energy (500 eV) Cs+ ions. The selected sample coatings were pure polycarbonate (PC; reference), PC with 5 wt. % graphene nanoplatelets, PC with 5 wt. % Fe3O4 magnetic nanoparticles (MNPs), and PC with 10 wt. % graphene oxide decorated with similar MNPs. The original surfaces and crater bottoms obtained after a fixed ion dose were carefully analyzed by stylus profilometry and atomic force microscopy in order to extract crater depth, sputtering yield, and roughness values. The main observation is that the crater roughness strongly increases in all cases when NPs are mixed with the polymer. However, there are specific behaviors depending on the NP inclusion types and the chosen primary beams. The observed effects are tentatively explained on the basis of fundamental studies of atom and cluster-induced sputtering.
ISSN:2166-2746
2166-2754
DOI:10.1116/1.5015989