Fabrication of antireflection structure film by roll-to-roll ultraviolet nanoimprint lithography
Antireflection (AR) films are useful in preventing the reflection of light from the displays of mobile phones and tablet computers. In particular, films with an AR structure known as the moth-eye structure show excellent performance in preventing light reflection. In a previous study, the authors re...
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Veröffentlicht in: | Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2014-11, Vol.32 (6) |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Antireflection (AR) films are useful in preventing the reflection of light from the displays of mobile phones and tablet computers. In particular, films with an AR structure known as the moth-eye structure show excellent performance in preventing light reflection. In a previous study, the authors reported the fabrication of an AR structure by oxygen ion-beam irradiation of glassy carbon (GC). The fabricated pattern consisted of a series of self-assembled conical structures and it had a low-reflection surface. In this study, the authors transferred this AR structure onto a polymer film by roll-to-roll ultraviolet nanoimprint lithography using a replica mold produced from a GC master mold with the AR structure. As a result, the authors were able to produce high-performance AR film at a feed rate of 1.8 m/min. The reflectivity of the film was about 0.1% and its transmittance was about 95% at visible wavelengths. |
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ISSN: | 2166-2746 2166-2754 |
DOI: | 10.1116/1.4901877 |