Radiofrequency pulsed glow discharge-ToFMS depth profiling of a CdTe solar cell: A comparative study versus time of flight secondary ion mass spectrometry

In this manuscript, the authors compare and contrast depth profile data generated on the same commercially available CdTe cell using two analytical techniques, Time of flight secondary ion mass spectroscopy (ToF-SIMS), which is a well-established technique, and radiofrequency pulsed glow discharge (...

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Veröffentlicht in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2013-11, Vol.31 (6)
Hauptverfasser: Gonzalez-Gago, Cristina, Pisonero, Jorge, Bordel, Nerea, Sanz-Medel, Alfredo, Tibbetts, Nicole J., Smentkowski, Vincent S.
Format: Artikel
Sprache:eng
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Zusammenfassung:In this manuscript, the authors compare and contrast depth profile data generated on the same commercially available CdTe cell using two analytical techniques, Time of flight secondary ion mass spectroscopy (ToF-SIMS), which is a well-established technique, and radiofrequency pulsed glow discharge (rf-PGD)-ToFMS, which is an emerging technique. The authors demonstrate that pulsed-rf-GD-ToFMS allows for a rapid analysis over a large (4 mm diameter) area of the sample at moderate vacuum conditions, while ToF-SIMS analyzes smaller regions (typically about 200 × 200 μm2) of the sample at ultrahigh vacuum conditions; the authors note that ToF-SIMS enables three dimensional analysis at micron or better lateral resolution. Both techniques show, in general, good agreement; however, some discrepancies are observed and discussed herein.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.4824164