Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation

The fabrication process, application, and properties of a novel piezoresistive multiprobe with an integrated thermal tip deflection actuator are described in this article. The optimized fabrication process of the microprobe enables high-frequency sensor operation and integration of a high sharp coni...

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Veröffentlicht in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2010-11, Vol.28 (6), p.C6N12-C6N17
Hauptverfasser: Woszczyna, Mirosław, Zawierucha, Paweł, Pałetko, Piotr, Zielony, Michał, Gotszalk, Teodor, Sarov, Yanko, Ivanov, Tzvetan, Frank, Andreas, Zöllner, Jens-Peter, Rangelow, Ivo W.
Format: Artikel
Sprache:eng
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Zusammenfassung:The fabrication process, application, and properties of a novel piezoresistive multiprobe with an integrated thermal tip deflection actuator are described in this article. The optimized fabrication process of the microprobe enables high-frequency sensor operation and integration of a high sharp conical tip, which was additionally covered with titanium using atomic layer deposition to improve mechanical endurance and ensure electrical conductivity. This microprobe was applied in high-resolution self-assembled monolayer surface investigations in which the piezoresistive cantilever with the integrated thermal deflection actuator was excited at two of its flexural-resonant eigenmodes. The excited second eigenmode and phase show different contrasts com-pared with images recorded at the first eigenmode.
ISSN:1071-1023
2166-2746
1520-8567
2166-2754
DOI:10.1116/1.3518465