Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation
The fabrication process, application, and properties of a novel piezoresistive multiprobe with an integrated thermal tip deflection actuator are described in this article. The optimized fabrication process of the microprobe enables high-frequency sensor operation and integration of a high sharp coni...
Gespeichert in:
Veröffentlicht in: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2010-11, Vol.28 (6), p.C6N12-C6N17 |
---|---|
Hauptverfasser: | , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The fabrication process, application, and properties of a novel piezoresistive multiprobe with an integrated thermal tip deflection actuator are described in this article. The optimized fabrication process of the microprobe enables high-frequency sensor operation and integration of a high sharp conical tip, which was additionally covered with titanium using atomic layer deposition to improve mechanical endurance and ensure electrical conductivity. This microprobe was applied in high-resolution self-assembled monolayer surface investigations in which the piezoresistive cantilever with the integrated thermal deflection actuator was excited at two of its flexural-resonant eigenmodes. The excited second eigenmode and phase show different contrasts com-pared with images recorded at the first eigenmode. |
---|---|
ISSN: | 1071-1023 2166-2746 1520-8567 2166-2754 |
DOI: | 10.1116/1.3518465 |