Thermal stability of GeSbTe thin films deposited by layer-by-layer metalorganic chemical vapor deposition
The thermal stability of the GeSbTe (GST) films deposited by layer-by-layer metalorganic chemical vapor deposition on the planar Ti Al N ∕ Si and on trenches 120 nm in diameter and 500 nm deep (with aspect ratio of 4:1) was investigated under various annealing temperatures and durations in a nitroge...
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Veröffentlicht in: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2009-11, Vol.27 (6), p.L54-L57 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The thermal stability of the GeSbTe (GST) films deposited by layer-by-layer metalorganic chemical vapor deposition on the planar
Ti
Al
N
∕
Si
and on trenches
120
nm
in diameter and
500
nm
deep (with aspect ratio of 4:1) was investigated under various annealing temperatures and durations in a nitrogen ambient atmosphere. The inhomogeneous distribution of the Ge and Sb elements in the as-grown GST layer was improved by a thermal treatment at
500
°
C
for
60
min
in nitrogen ambient. The GST films annealed above
500
°
C
for 30 and
60
min
were delaminated from the TiAlN electrode. Samples annealed at
700
°
C
for
1
min
, above the melting temperature of the GST, show a decreased thickness, indicating that the GST films were thermally unstable. The as-grown films on trenches did not show a complete fill of the structure, whereas the trenches were more fully filled after a thermal treatment at
500
°
C
for
60
min
. |
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ISSN: | 1071-1023 1520-8567 |
DOI: | 10.1116/1.3253472 |