Development of the compact low-energy soft x-ray CT instrument for the soft material structural analysis

Development of the compact low-energy soft x-ray CT instrument for the soft material structural analysis

Microtomography using the combination of microfocus x-ray source and the cone-beam technique is now becoming widely used in material science and in industry. Recently, the structural analysis of soft materials, such as polymer fibers and biological materials, is strongly required. A compact low-ener...

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Veröffentlicht in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2008-11, Vol.26 (6), p.2356-2361
Hauptverfasser: Miyoshi, Motosuke, Hamakubo, Takao, Kodama, Tatsuhiko, Tsuchiya, Masatoshi, Koishikawa, Atsushi, Aoki, Nobutada
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container_issue 6
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container_title Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
container_volume 26
creator Miyoshi, Motosuke
Hamakubo, Takao
Kodama, Tatsuhiko
Tsuchiya, Masatoshi
Koishikawa, Atsushi
Aoki, Nobutada
description Microtomography using the combination of microfocus x-ray source and the cone-beam technique is now becoming widely used in material science and in industry. Recently, the structural analysis of soft materials, such as polymer fibers and biological materials, is strongly required. A compact low-energy soft x-ray computed tomography (CT) instrument capable of soft material observation was developed, and the proof-of-concept system was constructed and evaluated. In this article, the authors describe an instrument that they developed for the x-ray CT of soft materials. A newly developed x-ray tube for generating the low-energy continuum soft x ray is also described. Tomographic observation examples of both biomaterials and industrial polymers are demonstrated.
doi_str_mv 10.1116/1.2978397
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title Development of the compact low-energy soft x-ray CT instrument for the soft material structural analysis
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