Development of the compact low-energy soft x-ray CT instrument for the soft material structural analysis
Microtomography using the combination of microfocus x-ray source and the cone-beam technique is now becoming widely used in material science and in industry. Recently, the structural analysis of soft materials, such as polymer fibers and biological materials, is strongly required. A compact low-ener...
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Veröffentlicht in: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2008-11, Vol.26 (6), p.2356-2361 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Microtomography using the combination of microfocus x-ray source and the cone-beam technique is now becoming widely used in material science and in industry. Recently, the structural analysis of soft materials, such as polymer fibers and biological materials, is strongly required. A compact low-energy soft x-ray computed tomography (CT) instrument capable of soft material observation was developed, and the proof-of-concept system was constructed and evaluated. In this article, the authors describe an instrument that they developed for the x-ray CT of soft materials. A newly developed x-ray tube for generating the low-energy continuum soft x ray is also described. Tomographic observation examples of both biomaterials and industrial polymers are demonstrated. |
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ISSN: | 1071-1023 1520-8567 |
DOI: | 10.1116/1.2978397 |