Development of a method for investigating carbon removal processes during photoassisted film growth using organometallic precursors: Application to platinum

A method is used to investigate carbon removal pathways during metal film growth using organometallic precursors. The approach combines a time-of-flight mass spectrometer with a growth chamber from which substrates can be removed during real-time film growth. Consequently, evolving mass spectral sig...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films International Journal Devoted to Vacuum, Surfaces, and Films, 2007-01, Vol.25 (1), p.104-109
Hauptverfasser:	Cahill, John J., Panayotov, Valentin G., Cowen, Kenneth A., Harris, Ernest, Koplitz, Lynn V., Birdwhistell, Kurt, Koplitz, Brent
Format:	Artikel
Sprache:	eng
Schlagworte:	CARBON DEPOSITION DEUTERIUM MASS SPECTRA MATERIALS SCIENCE METHYL RADICALS PLATINUM PRECURSOR REMOVAL SUBSTRATES THIN FILMS TIME-OF-FLIGHT MASS SPECTROMETERS TIME-OF-FLIGHT METHOD X-RAY PHOTOELECTRON SPECTROSCOPY
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!