Development of a method for investigating carbon removal processes during photoassisted film growth using organometallic precursors: Application to platinum
A method is used to investigate carbon removal pathways during metal film growth using organometallic precursors. The approach combines a time-of-flight mass spectrometer with a growth chamber from which substrates can be removed during real-time film growth. Consequently, evolving mass spectral sig...
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| Veröffentlicht in: | Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films International Journal Devoted to Vacuum, Surfaces, and Films, 2007-01, Vol.25 (1), p.104-109 |
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| container_end_page | 109 |
|---|---|
| container_issue | 1 |
| container_start_page | 104 |
| container_title | Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films |
| container_volume | 25 |
| creator | Cahill, John J. Panayotov, Valentin G. Cowen, Kenneth A. Harris, Ernest Koplitz, Lynn V. Birdwhistell, Kurt Koplitz, Brent |
| description | A method is used to investigate carbon removal pathways during metal film growth using organometallic precursors. The approach combines a time-of-flight mass spectrometer with a growth chamber from which substrates can be removed during real-time film growth. Consequently, evolving mass spectral signatures can be correlated with changing film properties. Although more general as a technique, results are presented for the photoassisted growth of Pt from
C
H
3
Cp
Pt
(
C
H
3
)
3
in a
D
2
atmosphere. Here, a marked increase in deuterium/hydrogen exchange is clearly correlated with an increase in the Pt:C ratio for the metal films, as determined by x-ray photoelectron spectroscopy. However, results for growth with
C
H
3
C
H
2
Cp
Pt
(
C
H
3
)
3
as well as
(
C
H
3
)
3
C
Cp
Pt
(
C
H
3
)
3
suggest that while extensive
D
∕
H
exchange can be a feature of the growth process, it is not a prerequisite for producing films with relatively high Pt:C ratios. |
| doi_str_mv | 10.1116/1.2400681 |
| format | Article |
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C
H
3
Cp
Pt
(
C
H
3
)
3
in a
D
2
atmosphere. Here, a marked increase in deuterium/hydrogen exchange is clearly correlated with an increase in the Pt:C ratio for the metal films, as determined by x-ray photoelectron spectroscopy. However, results for growth with
C
H
3
C
H
2
Cp
Pt
(
C
H
3
)
3
as well as
(
C
H
3
)
3
C
Cp
Pt
(
C
H
3
)
3
suggest that while extensive
D
∕
H
exchange can be a feature of the growth process, it is not a prerequisite for producing films with relatively high Pt:C ratios.</description><identifier>ISSN: 0734-2101</identifier><identifier>ISSN: 1553-1813</identifier><identifier>EISSN: 1520-8559</identifier><identifier>DOI: 10.1116/1.2400681</identifier><identifier>CODEN: JVTAD6</identifier><language>eng</language><publisher>United States: American Vacuum Society</publisher><subject>CARBON ; DEPOSITION ; DEUTERIUM ; MASS SPECTRA ; MATERIALS SCIENCE ; METHYL RADICALS ; PLATINUM ; PRECURSOR ; REMOVAL ; SUBSTRATES ; THIN FILMS ; TIME-OF-FLIGHT MASS SPECTROMETERS ; TIME-OF-FLIGHT METHOD ; X-RAY PHOTOELECTRON SPECTROSCOPY</subject><ispartof>Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, 2007-01, Vol.25 (1), p.104-109</ispartof><rights>American Vacuum Society</rights><rights>2007 American Vacuum Society</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c382t-d3d2125b0e86e2b87abfbaa672226102027b77ed49696e821224417a7df6286b3</citedby><cites>FETCH-LOGICAL-c382t-d3d2125b0e86e2b87abfbaa672226102027b77ed49696e821224417a7df6286b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,794,885,4512,27924,27925</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/20853939$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Cahill, John J.</creatorcontrib><creatorcontrib>Panayotov, Valentin G.</creatorcontrib><creatorcontrib>Cowen, Kenneth A.</creatorcontrib><creatorcontrib>Harris, Ernest</creatorcontrib><creatorcontrib>Koplitz, Lynn V.</creatorcontrib><creatorcontrib>Birdwhistell, Kurt</creatorcontrib><creatorcontrib>Koplitz, Brent</creatorcontrib><title>Development of a method for investigating carbon removal processes during photoassisted film growth using organometallic precursors: Application to platinum</title><title>Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films</title><description>A method is used to investigate carbon removal pathways during metal film growth using organometallic precursors. The approach combines a time-of-flight mass spectrometer with a growth chamber from which substrates can be removed during real-time film growth. Consequently, evolving mass spectral signatures can be correlated with changing film properties. Although more general as a technique, results are presented for the photoassisted growth of Pt from
C
H
3
Cp
Pt
(
C
H
3
)
3
in a
D
2
atmosphere. Here, a marked increase in deuterium/hydrogen exchange is clearly correlated with an increase in the Pt:C ratio for the metal films, as determined by x-ray photoelectron spectroscopy. However, results for growth with
C
H
3
C
H
2
Cp
Pt
(
C
H
3
)
3
as well as
(
C
H
3
)
3
C
Cp
Pt
(
C
H
3
)
3
suggest that while extensive
D
∕
H
exchange can be a feature of the growth process, it is not a prerequisite for producing films with relatively high Pt:C ratios.</description><subject>CARBON</subject><subject>DEPOSITION</subject><subject>DEUTERIUM</subject><subject>MASS SPECTRA</subject><subject>MATERIALS SCIENCE</subject><subject>METHYL RADICALS</subject><subject>PLATINUM</subject><subject>PRECURSOR</subject><subject>REMOVAL</subject><subject>SUBSTRATES</subject><subject>THIN FILMS</subject><subject>TIME-OF-FLIGHT MASS SPECTROMETERS</subject><subject>TIME-OF-FLIGHT METHOD</subject><subject>X-RAY PHOTOELECTRON SPECTROSCOPY</subject><issn>0734-2101</issn><issn>1553-1813</issn><issn>1520-8559</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><recordid>eNp9kc9q3DAQxkVpoNtNDn0DQU8tOJHGtuztoRA2f2Ehl-QsZHm862J7jKTdkHfJw0bOLrRQNugg0Py-b2Y-MfZNinMppbqQ55AJoUr5ic1kDiIp83zxmc1EkWYJSCG_sK_e_xFCAAg1Y69XuMOOxh6HwKnhhvcYNlTzhhxvhx360K5NaIc1t8ZVNHCHPe1Mx0dHFr1Hz-utm-rjhgIZ71sfMOrbrudrR89hw7d-qpNbm4Givem61kY92q3z5PwvfjmO8Sm2if6B-NhNHbf9KTtpTOfx7HDP2dPN9ePyLlk93N4vL1eJTUsISZ3WICGvBJYKoSoLUzWVMaoAACUFCCiqosA6W6iFwjKykGWyMEXdKChVlc7Z970vxW21t21Au7E0DGiDBlHm6SKeOfuxp6wj7x02enRtb9yLlkJP4WupD-FH9veencze9zoO__MDmhptdIwoGvw8ZrAj91esx7r5CP5_tDfUA6w1</recordid><startdate>20070101</startdate><enddate>20070101</enddate><creator>Cahill, John J.</creator><creator>Panayotov, Valentin G.</creator><creator>Cowen, Kenneth A.</creator><creator>Harris, Ernest</creator><creator>Koplitz, Lynn V.</creator><creator>Birdwhistell, Kurt</creator><creator>Koplitz, Brent</creator><general>American Vacuum Society</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20070101</creationdate><title>Development of a method for investigating carbon removal processes during photoassisted film growth using organometallic precursors: Application to platinum</title><author>Cahill, John J. ; Panayotov, Valentin G. ; Cowen, Kenneth A. ; Harris, Ernest ; Koplitz, Lynn V. ; Birdwhistell, Kurt ; Koplitz, Brent</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c382t-d3d2125b0e86e2b87abfbaa672226102027b77ed49696e821224417a7df6286b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><topic>CARBON</topic><topic>DEPOSITION</topic><topic>DEUTERIUM</topic><topic>MASS SPECTRA</topic><topic>MATERIALS SCIENCE</topic><topic>METHYL RADICALS</topic><topic>PLATINUM</topic><topic>PRECURSOR</topic><topic>REMOVAL</topic><topic>SUBSTRATES</topic><topic>THIN FILMS</topic><topic>TIME-OF-FLIGHT MASS SPECTROMETERS</topic><topic>TIME-OF-FLIGHT METHOD</topic><topic>X-RAY PHOTOELECTRON SPECTROSCOPY</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Cahill, John J.</creatorcontrib><creatorcontrib>Panayotov, Valentin G.</creatorcontrib><creatorcontrib>Cowen, Kenneth A.</creatorcontrib><creatorcontrib>Harris, Ernest</creatorcontrib><creatorcontrib>Koplitz, Lynn V.</creatorcontrib><creatorcontrib>Birdwhistell, Kurt</creatorcontrib><creatorcontrib>Koplitz, Brent</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Cahill, John J.</au><au>Panayotov, Valentin G.</au><au>Cowen, Kenneth A.</au><au>Harris, Ernest</au><au>Koplitz, Lynn V.</au><au>Birdwhistell, Kurt</au><au>Koplitz, Brent</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Development of a method for investigating carbon removal processes during photoassisted film growth using organometallic precursors: Application to platinum</atitle><jtitle>Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films</jtitle><date>2007-01-01</date><risdate>2007</risdate><volume>25</volume><issue>1</issue><spage>104</spage><epage>109</epage><pages>104-109</pages><issn>0734-2101</issn><issn>1553-1813</issn><eissn>1520-8559</eissn><coden>JVTAD6</coden><abstract>A method is used to investigate carbon removal pathways during metal film growth using organometallic precursors. The approach combines a time-of-flight mass spectrometer with a growth chamber from which substrates can be removed during real-time film growth. Consequently, evolving mass spectral signatures can be correlated with changing film properties. Although more general as a technique, results are presented for the photoassisted growth of Pt from
C
H
3
Cp
Pt
(
C
H
3
)
3
in a
D
2
atmosphere. Here, a marked increase in deuterium/hydrogen exchange is clearly correlated with an increase in the Pt:C ratio for the metal films, as determined by x-ray photoelectron spectroscopy. However, results for growth with
C
H
3
C
H
2
Cp
Pt
(
C
H
3
)
3
as well as
(
C
H
3
)
3
C
Cp
Pt
(
C
H
3
)
3
suggest that while extensive
D
∕
H
exchange can be a feature of the growth process, it is not a prerequisite for producing films with relatively high Pt:C ratios.</abstract><cop>United States</cop><pub>American Vacuum Society</pub><doi>10.1116/1.2400681</doi><tpages>6</tpages></addata></record> |
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| identifier | ISSN: 0734-2101 |
| ispartof | Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, 2007-01, Vol.25 (1), p.104-109 |
| issn | 0734-2101 1553-1813 1520-8559 |
| language | eng |
| recordid | cdi_crossref_primary_10_1116_1_2400681 |
| source | AIP Journals Complete |
| subjects | CARBON DEPOSITION DEUTERIUM MASS SPECTRA MATERIALS SCIENCE METHYL RADICALS PLATINUM PRECURSOR REMOVAL SUBSTRATES THIN FILMS TIME-OF-FLIGHT MASS SPECTROMETERS TIME-OF-FLIGHT METHOD X-RAY PHOTOELECTRON SPECTROSCOPY |
| title | Development of a method for investigating carbon removal processes during photoassisted film growth using organometallic precursors: Application to platinum |
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