Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum
The basic characteristics of the axial-symmetric transmission gauge (AT gauge), that were modified for measurement over a wide pressure range, are reported. A Faraday cup ion collector is used instead of a secondary electron multiplier to extend the measurable pressure range to 10 − 3 Pa . The sensi...
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| Veröffentlicht in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2005-05, Vol.23 (3), p.554-558 |
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| container_end_page | 558 |
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| container_issue | 3 |
| container_start_page | 554 |
| container_title | Journal of vacuum science & technology. A, Vacuum, surfaces, and films |
| container_volume | 23 |
| creator | Takahashi, N. Yuyama, J. Tuzi, Y. Akimichi, H. Arakawa, I. |
| description | The basic characteristics of the axial-symmetric transmission gauge (AT gauge), that were modified for measurement over a wide pressure range, are reported. A Faraday cup ion collector is used instead of a secondary electron multiplier to extend the measurable pressure range to
10
−
3
Pa
. The sensitivity of the gauge was determined by a conductance modulation method, and by direct comparison against an extractor gauge and a spinning rotor gauge as well. When operating in
O
2
, there was systematic disagreement between pressure readings with the AT gauge and the extractor gauge. This is due to the difference in the elimination efficiency of the electron stimulated desorption ion. |
| doi_str_mv | 10.1116/1.1901668 |
| format | Article |
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10
−
3
Pa
. The sensitivity of the gauge was determined by a conductance modulation method, and by direct comparison against an extractor gauge and a spinning rotor gauge as well. When operating in
O
2
, there was systematic disagreement between pressure readings with the AT gauge and the extractor gauge. This is due to the difference in the elimination efficiency of the electron stimulated desorption ion.</description><identifier>ISSN: 0734-2101</identifier><identifier>EISSN: 1520-8559</identifier><identifier>DOI: 10.1116/1.1901668</identifier><identifier>CODEN: JVTAD6</identifier><language>eng</language><publisher>American Vacuum Society</publisher><ispartof>Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2005-05, Vol.23 (3), p.554-558</ispartof><rights>American Vacuum Society</rights><rights>2005 American Vacuum Society</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c354t-320af924aba65dec563fe475a7129d9491f717aa5d0e6a1fc1c937ebff8e1bcb3</citedby><cites>FETCH-LOGICAL-c354t-320af924aba65dec563fe475a7129d9491f717aa5d0e6a1fc1c937ebff8e1bcb3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,794,4510,27922,27923</link.rule.ids></links><search><creatorcontrib>Takahashi, N.</creatorcontrib><creatorcontrib>Yuyama, J.</creatorcontrib><creatorcontrib>Tuzi, Y.</creatorcontrib><creatorcontrib>Akimichi, H.</creatorcontrib><creatorcontrib>Arakawa, I.</creatorcontrib><title>Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum</title><title>Journal of vacuum science & technology. A, Vacuum, surfaces, and films</title><description>The basic characteristics of the axial-symmetric transmission gauge (AT gauge), that were modified for measurement over a wide pressure range, are reported. A Faraday cup ion collector is used instead of a secondary electron multiplier to extend the measurable pressure range to
10
−
3
Pa
. The sensitivity of the gauge was determined by a conductance modulation method, and by direct comparison against an extractor gauge and a spinning rotor gauge as well. When operating in
O
2
, there was systematic disagreement between pressure readings with the AT gauge and the extractor gauge. This is due to the difference in the elimination efficiency of the electron stimulated desorption ion.</description><issn>0734-2101</issn><issn>1520-8559</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNqNkMtKAzEUhoMoWKsL3yBbhak5c-24EEqpFyi40fVwJnMyjcylJJnSvo2P6kxbdKW4OPyc8OUn-Ri7BjEBgPgOJpAKiOPpCRtB5AtvGkXpKRuJJAg9HwScswtrP4QQvi_iEfucbTVWnt3VNTmjJXcGG1tra3Xb8BK7ku75Yuuo2R-0imtn-dqQtZ0hXhP2qZuS99dK4tgU3FDRSXek3Yo4VSSd6XfrdN1V6KjgBdnWrPfUMKRUz3Dd8K7qX7DS5YpvUHZdfcnOFFaWro45Zu-Pi7f5s7d8fXqZz5aeDKLQeYEvUKV-iDnGUUEyigNFYRJhAn5apGEKKoEEMSoExQhKgkyDhHKlpgS5zIMxuzn0StNaa0hla6NrNLsMRDaozSA7qu3ZhwNrpXY4fOJ3eO83-_abDX77gtt_F_wFb1rzA2brQgVfmiajLA</recordid><startdate>20050501</startdate><enddate>20050501</enddate><creator>Takahashi, N.</creator><creator>Yuyama, J.</creator><creator>Tuzi, Y.</creator><creator>Akimichi, H.</creator><creator>Arakawa, I.</creator><general>American Vacuum Society</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20050501</creationdate><title>Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum</title><author>Takahashi, N. ; Yuyama, J. ; Tuzi, Y. ; Akimichi, H. ; Arakawa, I.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c354t-320af924aba65dec563fe475a7129d9491f717aa5d0e6a1fc1c937ebff8e1bcb3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Takahashi, N.</creatorcontrib><creatorcontrib>Yuyama, J.</creatorcontrib><creatorcontrib>Tuzi, Y.</creatorcontrib><creatorcontrib>Akimichi, H.</creatorcontrib><creatorcontrib>Arakawa, I.</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of vacuum science & technology. A, Vacuum, surfaces, and films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Takahashi, N.</au><au>Yuyama, J.</au><au>Tuzi, Y.</au><au>Akimichi, H.</au><au>Arakawa, I.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum</atitle><jtitle>Journal of vacuum science & technology. A, Vacuum, surfaces, and films</jtitle><date>2005-05-01</date><risdate>2005</risdate><volume>23</volume><issue>3</issue><spage>554</spage><epage>558</epage><pages>554-558</pages><issn>0734-2101</issn><eissn>1520-8559</eissn><coden>JVTAD6</coden><abstract>The basic characteristics of the axial-symmetric transmission gauge (AT gauge), that were modified for measurement over a wide pressure range, are reported. A Faraday cup ion collector is used instead of a secondary electron multiplier to extend the measurable pressure range to
10
−
3
Pa
. The sensitivity of the gauge was determined by a conductance modulation method, and by direct comparison against an extractor gauge and a spinning rotor gauge as well. When operating in
O
2
, there was systematic disagreement between pressure readings with the AT gauge and the extractor gauge. This is due to the difference in the elimination efficiency of the electron stimulated desorption ion.</abstract><pub>American Vacuum Society</pub><doi>10.1116/1.1901668</doi><tpages>5</tpages></addata></record> |
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| ispartof | Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2005-05, Vol.23 (3), p.554-558 |
| issn | 0734-2101 1520-8559 |
| language | eng |
| recordid | cdi_crossref_primary_10_1116_1_1901668 |
| source | AIP Journals Complete |
| title | Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum |
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