Single crystal growth of Ge1−xSix alloys using the traveling solvent method
Single crystal growth of Ge1−xSix alloys with Si composition ranging from 2 to 15 at. %. using the traveling solvent method (TSM) is presented. The growths were carried out using Ge 〈111〉 seeds or a self-seeding method. Electron microprobe, Laue x-ray, and Hall effect techniques were used to charact...
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Veröffentlicht in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2004-05, Vol.22 (3), p.962-965 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Single crystal growth of Ge1−xSix alloys with Si composition ranging from 2 to 15 at. %. using the traveling solvent method (TSM) is presented. The growths were carried out using Ge 〈111〉 seeds or a self-seeding method. Electron microprobe, Laue x-ray, and Hall effect techniques were used to characterize the quality of the materials. The standard deviations associated with the composition profiles along and transverse to the growth direction were less than 0.4 and 0.3 at. %, respectively. A change in conductivity from n to p type in the TSM samples was observed at a Si composition |
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ISSN: | 0734-2101 1520-8559 |
DOI: | 10.1116/1.1651546 |