Gated carbon-based cold cathode for high current applications
We have developed a gated carbon-based cold cathode capable of operating at high current densities for use in applications such as cathode-ray tubes, microwave devices, and x-ray sources. The carbon-based electron-emitting material is a good choice for these applications as it does not readily form...
Gespeichert in:
Veröffentlicht in: | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2003-07, Vol.21 (4), p.1738-1741 |
---|---|
Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | We have developed a gated carbon-based cold cathode capable of operating at high current densities for use in applications such as cathode-ray tubes, microwave devices, and x-ray sources. The carbon-based electron-emitting material is a good choice for these applications as it does not readily form a native oxide when exposed to atmosphere. Cathodes can thus be pretested in a vacuum chamber before insertion into the final device. Given that carbon has a low sputtering yield and is relatively inert, this material is an ideal candidate for long-lived applications in moderate vacuum environments. Our present 500-μm-diam cold cathode array contains approximately 5000 individual microtips and emits 0.1–500 μA for a gate voltage of 70–118 V. The average current density over the array is about
0.25
A/cm
2
at 500 μA emission current. Long-term testing of individual cold cathodes at current densities of
0.10
A/cm
2
in cathode-ray tubes has shown lifetimes in excess of 5000 h. Peak currents exceeding 10 mA (current densities of
5
A/cm
2
)
have been achieved. |
---|---|
ISSN: | 0734-211X 1071-1023 1520-8567 |
DOI: | 10.1116/1.1587135 |