X-ray photoelectron spectroscopy study of electrodeposited nanostructured CeO2 films

Nanostructured CeO2 films are produced by anodic electrodeposition onto a variety of substrates. The crystal structure and oxidation state of the films are studied by x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS), respectively. Calculations from XRD show that crystallite sizes o...

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Veröffentlicht in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2003-05, Vol.21 (3), p.1169-1175
Hauptverfasser: Wang, Adele Qi, Punchaipetch, Prakaipetch, Wallace, Robert M., Golden, Teresa Diane
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container_title Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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creator Wang, Adele Qi
Punchaipetch, Prakaipetch
Wallace, Robert M.
Golden, Teresa Diane
description Nanostructured CeO2 films are produced by anodic electrodeposition onto a variety of substrates. The crystal structure and oxidation state of the films are studied by x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS), respectively. Calculations from XRD show that crystallite sizes of the electrodeposited films range from 6–10 nm. Sintering of these films to 700 °C increases the grain size to approximately 25 nm. A study of Ce 3d, Ce 4d, O 1s, and the valence-band region indicates that the Ce(IV)/Ce(III) ratio increases with sintering temperature, with features of both Ce4+ and Ce3+ identified by XPS. Ce 3d and O 1s characteristics show that high-temperature sintering of the films facilitates Ce(IV) oxide formation.
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title X-ray photoelectron spectroscopy study of electrodeposited nanostructured CeO2 films
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