X-ray photoelectron spectroscopy study of electrodeposited nanostructured CeO2 films
Nanostructured CeO2 films are produced by anodic electrodeposition onto a variety of substrates. The crystal structure and oxidation state of the films are studied by x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS), respectively. Calculations from XRD show that crystallite sizes o...
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Veröffentlicht in: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2003-05, Vol.21 (3), p.1169-1175 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Nanostructured CeO2 films are produced by anodic electrodeposition onto a variety of substrates. The crystal structure and oxidation state of the films are studied by x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS), respectively. Calculations from XRD show that crystallite sizes of the electrodeposited films range from 6–10 nm. Sintering of these films to 700 °C increases the grain size to approximately 25 nm. A study of Ce 3d, Ce 4d, O 1s, and the valence-band region indicates that the Ce(IV)/Ce(III) ratio increases with sintering temperature, with features of both Ce4+ and Ce3+ identified by XPS. Ce 3d and O 1s characteristics show that high-temperature sintering of the films facilitates Ce(IV) oxide formation. |
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ISSN: | 1071-1023 1520-8567 |
DOI: | 10.1116/1.1577569 |