Improved room-temperature continuous wave GaAs/AlGaAs and InGaAs/GaAs/AlGaAs lasers fabricated on Si substrates via relaxed graded GexSi1−x buffer layers

Improved GaAs/AlGaAs quantum well lasers were fabricated with longer lifetimes, higher efficiencies, and lower threshold current densities than previously reported devices on Ge/GeSi relaxed graded buffers on Si substrates. Uncoated broad-area lasers operated continuously at 858 nm with a differenti...

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Veröffentlicht in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2003-05, Vol.21 (3), p.1064-1069
Hauptverfasser: Groenert, Michael E., Pitera, Arthur J., Ram, Rajeev J., Fitzgerald, Eugene A.
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container_title Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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creator Groenert, Michael E.
Pitera, Arthur J.
Ram, Rajeev J.
Fitzgerald, Eugene A.
description Improved GaAs/AlGaAs quantum well lasers were fabricated with longer lifetimes, higher efficiencies, and lower threshold current densities than previously reported devices on Ge/GeSi relaxed graded buffers on Si substrates. Uncoated broad-area lasers operated continuously at 858 nm with a differential quantum efficiency of 0.40 and a threshold current density of 269 A/cm2. Similar devices fabricated on GaAs substrates demonstrated nearly identical performance. Operating lifetimes on Si substrates were nearly 4 h, a 1 order of magnitude improvement over previous devices. In addition, strained InGaAs quantum well lasers have been operated continuously at room temperature on Ge/GeSi/Si substrates with a differential quantum efficiency of 0.26 and a threshold current density of 700 A/cm2. Electroluminescence analyses of the failure behavior of both types of devices have suggested that recombination-enhanced defect reactions are limiting laser lifetime on Si substrates.
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fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1116_1_1576397</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1116_1_1576397</sourcerecordid><originalsourceid>FETCH-LOGICAL-c293t-f88fa062ba41b181e9671c3b1972e028a927a43f2deed474b018e9852f0284673</originalsourceid><addsrcrecordid>eNpNkL1OwzAUhS0EEqUw8AZeGdL62kmcjFUFoVIlhsIc3STXKCg_lZ2U9g2YWXk7ngQXOjB9R-dI33AYuwUxA4B4DjOIdKxSfcYmEEkRJFGsz30WGgIQUl2yK-fehBBxpNSEfa3are13VHHb920wULsli8NoiZd9N9Td2I-Ov-OOeIYLN180R3DsKr7qfpv_dYOOrOMGC1uXOHhr3_FNzd1YuMFryfFdjdxSg3s_vlqsPDLab2r4_vjc82I0hqz3HLznml0YbBzdnDhlLw_3z8vHYP2UrZaLdVDKVA2BSRKDIpYFhlBAApTGGkpVQKolCZlgKjWGysiKqAp1WAhIKE0iafwYxlpN2d2ft7S9c5ZMvrV1i_aQg8iPr-aQn15VP0nJa74</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Improved room-temperature continuous wave GaAs/AlGaAs and InGaAs/GaAs/AlGaAs lasers fabricated on Si substrates via relaxed graded GexSi1−x buffer layers</title><source>AIP Journals Complete</source><creator>Groenert, Michael E. ; Pitera, Arthur J. ; Ram, Rajeev J. ; Fitzgerald, Eugene A.</creator><creatorcontrib>Groenert, Michael E. ; Pitera, Arthur J. ; Ram, Rajeev J. ; Fitzgerald, Eugene A.</creatorcontrib><description>Improved GaAs/AlGaAs quantum well lasers were fabricated with longer lifetimes, higher efficiencies, and lower threshold current densities than previously reported devices on Ge/GeSi relaxed graded buffers on Si substrates. Uncoated broad-area lasers operated continuously at 858 nm with a differential quantum efficiency of 0.40 and a threshold current density of 269 A/cm2. Similar devices fabricated on GaAs substrates demonstrated nearly identical performance. Operating lifetimes on Si substrates were nearly 4 h, a 1 order of magnitude improvement over previous devices. In addition, strained InGaAs quantum well lasers have been operated continuously at room temperature on Ge/GeSi/Si substrates with a differential quantum efficiency of 0.26 and a threshold current density of 700 A/cm2. Electroluminescence analyses of the failure behavior of both types of devices have suggested that recombination-enhanced defect reactions are limiting laser lifetime on Si substrates.</description><identifier>ISSN: 1071-1023</identifier><identifier>EISSN: 1520-8567</identifier><identifier>DOI: 10.1116/1.1576397</identifier><language>eng</language><ispartof>Journal of vacuum science &amp; technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2003-05, Vol.21 (3), p.1064-1069</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c293t-f88fa062ba41b181e9671c3b1972e028a927a43f2deed474b018e9852f0284673</citedby><cites>FETCH-LOGICAL-c293t-f88fa062ba41b181e9671c3b1972e028a927a43f2deed474b018e9852f0284673</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27915,27916</link.rule.ids></links><search><creatorcontrib>Groenert, Michael E.</creatorcontrib><creatorcontrib>Pitera, Arthur J.</creatorcontrib><creatorcontrib>Ram, Rajeev J.</creatorcontrib><creatorcontrib>Fitzgerald, Eugene A.</creatorcontrib><title>Improved room-temperature continuous wave GaAs/AlGaAs and InGaAs/GaAs/AlGaAs lasers fabricated on Si substrates via relaxed graded GexSi1−x buffer layers</title><title>Journal of vacuum science &amp; technology. B, Microelectronics and nanometer structures processing, measurement and phenomena</title><description>Improved GaAs/AlGaAs quantum well lasers were fabricated with longer lifetimes, higher efficiencies, and lower threshold current densities than previously reported devices on Ge/GeSi relaxed graded buffers on Si substrates. Uncoated broad-area lasers operated continuously at 858 nm with a differential quantum efficiency of 0.40 and a threshold current density of 269 A/cm2. Similar devices fabricated on GaAs substrates demonstrated nearly identical performance. Operating lifetimes on Si substrates were nearly 4 h, a 1 order of magnitude improvement over previous devices. In addition, strained InGaAs quantum well lasers have been operated continuously at room temperature on Ge/GeSi/Si substrates with a differential quantum efficiency of 0.26 and a threshold current density of 700 A/cm2. Electroluminescence analyses of the failure behavior of both types of devices have suggested that recombination-enhanced defect reactions are limiting laser lifetime on Si substrates.</description><issn>1071-1023</issn><issn>1520-8567</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2003</creationdate><recordtype>article</recordtype><recordid>eNpNkL1OwzAUhS0EEqUw8AZeGdL62kmcjFUFoVIlhsIc3STXKCg_lZ2U9g2YWXk7ngQXOjB9R-dI33AYuwUxA4B4DjOIdKxSfcYmEEkRJFGsz30WGgIQUl2yK-fehBBxpNSEfa3are13VHHb920wULsli8NoiZd9N9Td2I-Ov-OOeIYLN180R3DsKr7qfpv_dYOOrOMGC1uXOHhr3_FNzd1YuMFryfFdjdxSg3s_vlqsPDLab2r4_vjc82I0hqz3HLznml0YbBzdnDhlLw_3z8vHYP2UrZaLdVDKVA2BSRKDIpYFhlBAApTGGkpVQKolCZlgKjWGysiKqAp1WAhIKE0iafwYxlpN2d2ft7S9c5ZMvrV1i_aQg8iPr-aQn15VP0nJa74</recordid><startdate>20030501</startdate><enddate>20030501</enddate><creator>Groenert, Michael E.</creator><creator>Pitera, Arthur J.</creator><creator>Ram, Rajeev J.</creator><creator>Fitzgerald, Eugene A.</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20030501</creationdate><title>Improved room-temperature continuous wave GaAs/AlGaAs and InGaAs/GaAs/AlGaAs lasers fabricated on Si substrates via relaxed graded GexSi1−x buffer layers</title><author>Groenert, Michael E. ; Pitera, Arthur J. ; Ram, Rajeev J. ; Fitzgerald, Eugene A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c293t-f88fa062ba41b181e9671c3b1972e028a927a43f2deed474b018e9852f0284673</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2003</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Groenert, Michael E.</creatorcontrib><creatorcontrib>Pitera, Arthur J.</creatorcontrib><creatorcontrib>Ram, Rajeev J.</creatorcontrib><creatorcontrib>Fitzgerald, Eugene A.</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of vacuum science &amp; technology. B, Microelectronics and nanometer structures processing, measurement and phenomena</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Groenert, Michael E.</au><au>Pitera, Arthur J.</au><au>Ram, Rajeev J.</au><au>Fitzgerald, Eugene A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Improved room-temperature continuous wave GaAs/AlGaAs and InGaAs/GaAs/AlGaAs lasers fabricated on Si substrates via relaxed graded GexSi1−x buffer layers</atitle><jtitle>Journal of vacuum science &amp; technology. B, Microelectronics and nanometer structures processing, measurement and phenomena</jtitle><date>2003-05-01</date><risdate>2003</risdate><volume>21</volume><issue>3</issue><spage>1064</spage><epage>1069</epage><pages>1064-1069</pages><issn>1071-1023</issn><eissn>1520-8567</eissn><abstract>Improved GaAs/AlGaAs quantum well lasers were fabricated with longer lifetimes, higher efficiencies, and lower threshold current densities than previously reported devices on Ge/GeSi relaxed graded buffers on Si substrates. Uncoated broad-area lasers operated continuously at 858 nm with a differential quantum efficiency of 0.40 and a threshold current density of 269 A/cm2. Similar devices fabricated on GaAs substrates demonstrated nearly identical performance. Operating lifetimes on Si substrates were nearly 4 h, a 1 order of magnitude improvement over previous devices. In addition, strained InGaAs quantum well lasers have been operated continuously at room temperature on Ge/GeSi/Si substrates with a differential quantum efficiency of 0.26 and a threshold current density of 700 A/cm2. Electroluminescence analyses of the failure behavior of both types of devices have suggested that recombination-enhanced defect reactions are limiting laser lifetime on Si substrates.</abstract><doi>10.1116/1.1576397</doi><tpages>6</tpages></addata></record>
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title Improved room-temperature continuous wave GaAs/AlGaAs and InGaAs/GaAs/AlGaAs lasers fabricated on Si substrates via relaxed graded GexSi1−x buffer layers
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-15T06%3A10%3A59IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Improved%20room-temperature%20continuous%20wave%20GaAs/AlGaAs%20and%20InGaAs/GaAs/AlGaAs%20lasers%20fabricated%20on%20Si%20substrates%20via%20relaxed%20graded%20GexSi1%E2%88%92x%20buffer%20layers&rft.jtitle=Journal%20of%20vacuum%20science%20&%20technology.%20B,%20Microelectronics%20and%20nanometer%20structures%20processing,%20measurement%20and%20phenomena&rft.au=Groenert,%20Michael%20E.&rft.date=2003-05-01&rft.volume=21&rft.issue=3&rft.spage=1064&rft.epage=1069&rft.pages=1064-1069&rft.issn=1071-1023&rft.eissn=1520-8567&rft_id=info:doi/10.1116/1.1576397&rft_dat=%3Ccrossref%3E10_1116_1_1576397%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true