Role of molecular diffusion in the theory of gas flow through crimped-capillary leaks
Gas flow through crimped-capillary leaks was studied with the use of a mass spectrometric system. The crimped-capillary leak was used as a single-stage pressure-reduction device between a gas inlet manifold and an ultrahigh-vacuum mass spectrometer. The steady state flows of binary gas mixtures ( H...
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| Veröffentlicht in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2003-05, Vol.21 (3), p.806-813 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Gas flow through crimped-capillary leaks was studied with the use of a mass spectrometric system. The crimped-capillary leak was used as a single-stage pressure-reduction device between a gas inlet manifold and an ultrahigh-vacuum mass spectrometer. The steady state flows of binary gas mixtures
(
H
2
–
4
He
and
H
2
–D
2
)
through the crimped-capillary leak into the mass spectrometer vacuum chamber
( |
|---|---|
| ISSN: | 0734-2101 1520-8559 |
| DOI: | 10.1116/1.1569924 |