Recommended practice for calibrating vacuum gauges of the thermal conductivity type

This article describes and recommends various methods for calibration of thermal conductivity vacuum gauges in the pressure range of the order of 10 −1 Pa ( 10 −3 Torr) to an atmosphere and is one of a series published by the American Vacuum Society. It contains data from many sources and represents the opinions of a number of experts in the field. The text was developed by a sub-committee of the Recommended Practice Committee of the American Vacuum Society. The Thermal Conductivity Gauging Committee is made up of users and manufacturers of vacuum gauges who have a variety of experience in the practical use of thermal conductivity gauges.