Stress Modulation and Ferroelectric Properties of Nanograined PbTiO 3 Thick Films on the Different Substrates Fabricated by Aerosol Deposition

Nanograined PbTiO 3 ( PT ) thick films were deposited on Si , yttria‐stabilized zirconia ( YSZ ), and Ni substrates using an aerosol deposition ( AD ) method at room temperature. The AD PT thick films on each different substrate were annealed at 500°C and 700°C for 1 h to increase the crystallinity. The stresses in the PT film were modulated by controlling the difference in the coefficient of thermal expansion ( CTE ) between the films and substrates during the thermal annealing process. The morphology of the AD PT films was examined from the polycrystalline dense structure (thickness ~8 μm), and the changes in the crystallographic phase, in‐plane stresses, and ferroelectric properties in annealed films were investigated. In‐plane stress analysis showed that the PT films annealed at 500°C and 700°C on each substrate exhibited compressive stress. Owing to the effects of compressive stress in the PT film, the film showed less tetragonality ( c / a ratio) and enhanced ferroelectric behaviors. The change in the polarization–electric field ( P–E ) hysteresis loop of the PT films was explained by the stress induced from CTE mismatch between the films and substrates.