Accurate measurement of anhydride fluorhydric acid concentration in controlled gaseous flow with STW sensors

This paper presents theoretical and experimental developments for the implementation of surface acoustic waves (SAW) sensors able to detect small concentrations of anhydride fluorhydric (HF) acid in air. Solutions based on the use of surface transverse waves (STW) on quartz (YXl t )/36° 90° have been analyzed to evaluate their sensitivity to HF. Devices have been tested first in a NH 4 F solution to evaluate the kinetics of the reaction. Measurements then were performed under various gaseous conditions to characterize the sensors when they are submitted to different controlled dilutions of HF in air. STW resonators have been successfully tested in different conditions, with capabilities to detect HF concentration much smaller than 1 ppm.