Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing

Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing

We discuss inline electrical testing to monitor the baseline of Analog Computing hardware using Phase Change Memory (PCM) technology. Tightening the PCM resistance distribution is necessary to meet analog computation requirement. A new yield methodology is introduced. A study of heater process varia...

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Veröffentlicht in:IEEE transactions on semiconductor manufacturing 2023-08, Vol.36 (3), p.1-1
Hauptverfasser: Chan, Victor, Gasasira, A., Pujari, R., Tseng, W-T, Gordon, T., Southwick, R., Ok, I., Choi, S., Silvestre, C., Utomo, H., Brew, K., Philip, T., Burr, G. W., Saulnier, N., Teehan, S., Ahsan, I.
Format: Artikel
Sprache:eng
Schlagworte:
analog computing
Computation
Computer memory
Conductors
Dielectrics
Phase change materials
Phase change memory
Programming
Resistance
Resistance heating
Tungsten
yield
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Zusammenfassung:We discuss inline electrical testing to monitor the baseline of Analog Computing hardware using Phase Change Memory (PCM) technology. Tightening the PCM resistance distribution is necessary to meet analog computation requirement. A new yield methodology is introduced. A study of heater process variation, which will affect the heater height and the PCM resistance, will be discussed.
ISSN:0894-6507
1558-2345
DOI:10.1109/TSM.2023.3284313