Special Section on the 2014 International Symposium on Semiconductor Manufacturing

Semiconductor manufacturing technology is reliant on the sum of the total of engineers' experiences and the accumulation of know-how and IP. The complexity of the field prevents a shift to the systematization and universalization of technologies. In order to bring breakthroughs in semiconductor...

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Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2015-08, Vol.28 (3), p.227-228
1. Verfasser:	Koike, Hidetoshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Meetings Monitoring Process control Semiconductor device manufacture Special issues and sections
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