Special Section on the 2014 International Symposium on Semiconductor Manufacturing

Semiconductor manufacturing technology is reliant on the sum of the total of engineers' experiences and the accumulation of know-how and IP. The complexity of the field prevents a shift to the systematization and universalization of technologies. In order to bring breakthroughs in semiconductor...

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Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2015-08, Vol.28 (3), p.227-228
1. Verfasser:	Koike, Hidetoshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Meetings Monitoring Process control Semiconductor device manufacture Special issues and sections
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Beschreibung
Zusammenfassung:	Semiconductor manufacturing technology is reliant on the sum of the total of engineers' experiences and the accumulation of know-how and IP. The complexity of the field prevents a shift to the systematization and universalization of technologies. In order to bring breakthroughs in semiconductor manufacturing to reflect changing and challenging new requirements, the International Symposium on Semiconductor Manufacturing (ISSM) was launched in 1992.
ISSN:	0894-6507 1558-2345
DOI:	10.1109/TSM.2015.2453611